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          Model Number

          Specifications

          Power/Output

          Features

          APR 250/260/262

          apr.jpg

          Compact Piezo Gauges.

          *Range: 1X10-1~1100 mbar,2x10-1~2200 mbar (262).

          *Temp.:

          80(Bakeout)

          10~60(Operating)

          -40~70(Storage)

          *Sensor cable length: 50m

          *Supply: 13~30 VDC, 0.2 W.

          *Output Signal:

          1~9.8 V (Pressure range)

          0.4 V(Sensor error below)

          10 k0hm (Minimum load)

          *Flange: DN 16 ISO-KF,DN 16 CF-F, G 1/4”.

          *Absolute pressure measurement, independent of gas type.

          *High accuracy from 1 mbar to 50 bar.

          *Corrosion resistant.

          Model Number

          Specifications

          Power/Output

          Features

          APR 265/266/267

          apr567.jpg

          Compact Piezo Gauges.

          *Range:

          1~5500 mbar(265)

          1~11000 mbar(266)

          5~55000 mbar(267)

          *Temp.:

          80(Bakeout)

          10~60(Operating)

          -40~70(Storage)

          *Supply: 13~30 VDC, 0.2 W

          *Output Signal:

          1~9.8 V (Pressure range)

          0.4 V(Sensor error below)

          10 k0hm (Minimum load)

          *Sensor cable length: 50m

          *Fitting: G 1/4”

          *Absolute pressure measurement, independent of gas type.

          *High accuracy from 1 mbar to 50 bar.

          *Corrosion resistant.

          Model Number

          Specifications

          Power/Output

          Features

          CMR261/262

          CMR263/264

          cmr1234.jpg

          Compact Capacitance Diaphragm Gauges

          *Temperature compensated.

          *Range:

          1x10-1~1100 mbar(261)

          1x10-2~110 mbar(262)

          1x10-3~11 mbar(263)

          1x10-4~1.1 mbar(264)

          *Temp.:

          65(Bakeout)

          5~50(Operating)

          -40~65(Storage)

          *Supply: 18~30 VDC. 1.8W

          *Output Signal:

          1~9.8 V (Pressure range)

          0.4 V(Sensor error below)

          10 k0hm (Minimum load)

          *Sensor cable length: 120m

          *Flange: Tube AD 1/2”, DN16 ISO-KF, DN 16 CF-R, 8VCR.

          *Absolute pressure measurement, independent of gas type.

          *Excellent long-term and temperature stability.

          *Minimal zero drift.

          *Corrosion-resistant alumina construction.

           

          Model Number

          Specifications

          Power/Output

          Features

          CMR271/272/273

          cmr7173.jpg

          Compact Capacitance Diaphragm Gauges

          *Temperature controlled: 45.

          *Range:

          1x10-1~1100 mbar(271)

          1x10-2~110 mbar(272)

          1x10-3~11 mbar(273)

          *Temp.:

          65(Bakeout)

          15~40(Operating)

          -40~65(Storage)

          *Supply: 18~30 VDC. 7.5W

          *Output Signal:

          1~9.8 V (Pressure range)

          0.4 V(Sensor error below)

          10 k0hm (Minimum load)

          *Sensor cable length: 65m

          *Flange: Tube AD 1/2”, DN16 ISO-KF, DN 16 CF-R, 8VCR.

          *Absolute pressure measurement, independent of gas type.

          *Excellent long-term and temperature stability.

          *Minimal zero drift.

          *Corrosion-resistant alumina construction.

           

          Model Number

          Specifications

          Power/Output

          Features

          CMR274/275

          cmr7475.jpg

          Compact Capacitance Diaphragm Gauges

          *Temperature controlled: 45.

          *Range:

          1x10-4~1.1mbar(274)

          1x10-5~0.11mbar(275)

          *Temp.:

          65(Bakeout)

          15~40(Operating)

          -40~65(Storage)

          *Supply: 18~30 VDC. 7.5W

          *Output Signal:

          1~9.8 V (Pressure range)

          0.4 V(Sensor error below)

          10 k0hm (Minimum load)

          *Sensor cable length: 65m

          *Flange: Tube AD 1/2”,
            DN16  ISO-KF, DN 16 CF-R,
            8VCR.

          *Absolute pressure measurement, independent of gas type.

          *Excellent long-term and temperature stability.

          *Minimal zero drift.

          *Corrosion-resistant alumina construction.

           

          Model Number

          Specifications

          Power/Output

          Features

          TPR265/280

          tpr265.jpg

          Compact Pirani Gauge

          *Temperature controlled: 45.

          *Range:

          5x10-4~1000mbar

          *Temp.:

          80(Bakeout)

          5~60(Operating)

          -20~65(Storage)

          *Filament: Tungsten

          *Supply: 14~30 VDC. 1.5W

          *Output Signal:

          2.2~8.5 V (Pressure range)

          0.5 V(Sensor error below)

          10 k0hm (Minimum load)

          *Sensor cable length: 200m

          *Flange: DN16 ISO-KF,

          DN 16 CF-R.

          *Fitting: 1/8” NPT.

          *Compact and robust.

          *Optimum temperature compensation.

          *Stable and fasr measuring.

          Model Number

          Specifications

          Power/Output

          Features

          IKR 251/261

          ikr251261.jpg

          Compact Cold Cathode Gauge

          *Range:

          2x10-9~1x10-2mbar

          *Temp.:

          150/250(Bakeout)

          5~55(Operating)

          -40~65(Storage)

          *Seal: FPM or metal

          *Supply: 15~30 VDC. 2 W

          *Output Signal:

          1.8~8.5 V (Pressure range)

          0.5 V(Sensor error below)

          10 k0hm (Minimum load)

          *Sensor cable length: 500m

          *Flange: DN 25 ISO-KF, DN40 ISO-KF, DN40 CF-F.

          *No filament burn-out – cold ionization.

          *Withstands air Inrush.

          *Corrosion resistant.

          *Operating status display.

          *Inverted magnetron.

          Model Number

          Specifications

          Power/Output

          Features

          IKR 270

          ikr270.jpg

          Compact Cold Cathode Gauge

          *Range:

          5x10-11~1x10-2mbar

          *Temp.:

          250(Bakeout)

          5~55(Operating)

          -40~65(Storage)

          *Seal: metal

          * Supply: 15~30 VDC. 2 W

          *Output Signal:

          1.8~8.5 V (Pressure range)

          0.5 V(Sensor error below)

          10 k0hm (Minimum load)

          *Sensor cable length: 500m

          *Flange: DN40 CF-F.

          *No filament burn-out – cold ionization.

          *Withstands air Inrush.

          *Corrosion resistant.

          *Operating status display.

          *Inverted magnetron.

          Model Number

          Specifications

          Materials

          Features

          IMR 265

          imr265.jpg

          Compact Capacitance Diaphragm Gauge

          *Range:

          5x10-6~1000 mbar

          *Temp.:

          150(Bakeout)

          0~55(Operating)

          -20~70(Storage)

          *Flange: DN16/25/40 ISO-KF, DN40 CF-F.

          *Pirani measurement element: Copper,tungsten

          * Supply: 20~30 VDC. 16 W

          *Output Signal:

          1.5~7.5 V

          (Ioni Pressure range )

          8.5~9.75 V

          (Pirani Pressure range )

          0.5 V(Sensor error)

          10 k0hm (Minimum load)

          *Sensor cable length: 100m

           

          *Ideal for plasma and sputter processes.

          *High accuracy, excellent reproducibility.

          *Integrated Pirani switches the hot cathode automatically filament protection.

          Model Number

          Specifications

          Power/Output

          Features

          PBR 260

          pbr260.jpg

          Compact FullRange BA Gauge

          *Range:

          5x10-10~1000 mbar

          *Temp.:

          150(Bakeout)

          0~50(Operating)

          -20~70(Storage)

          *Filament: Tungsten

          * Supply: 20~28 VDC. 16 W

          *Output Signal:

          0.774~10 V

          (Pressure range )

          0.5 V(Sensor error below)

          10 k0hm (Minimum load)

          *Sensor cable length: 100m

          *Flange: DN 25/40 ISO-KF,

          DN40 CF-R.

          *Hot cathode(BA) with Pirani in one compact housing.

          *Bayar Alpert gauges swithched on/off automatically by Pirani gauge.

          *One port from atmosphere to UHV.

          Model Number

          Specifications

          Power/Output

          Features

          PKR 251/261

          pkr251261.jpg

          Compact Full Range Gauge

          *Range:

          5x10-9~1000mbar

          *Temp.:

          150(Bakeout)

          5~55(Operating)

          -40~65(Storage)

          *Seal: FPM or metal

          *Filament: Tungsten.

          * Supply: 15~30 VDC. 2 W

          *Output Signal:

          1.8~8.6 V (Pressure range)

          0.5 V(Sensor error below)

          9.5V(Sensor error above)

          10 k0hm (Minimum load)

          *Sensor cable length: 300m

          *Flange: DN40 CF-F.

          *Two gauges in one housing-cold cathode(Inverted magnetron) and Pirani.

          *Corrosion resistant.

          *One port from atmosphere to UHV.

          Model Number

          Specifications

          Power/Output

          Features

          Maxi Gauge

          TPG 256 A

          tpg256a.jpg

          Display and Control units for compact gauges.

          *Could connections for 6 gauges (max. 3 IMR265/PBR260)

          *Range: 5x10-11~55000 mbar.

          *Temp.:

          5~40(Operating)

          -20~60(Storage)

          *Protection: IP30.

           

          *Supply: 50/60 Hz, 90~250 VAC.

          *Output: 0~10 VDC.

          *Setpoint: 60 VDC, 3A, 6 pieces.

          *Error signal: 60 VDC, 1.5A, 1 piece.

          *Interface: RS232C, RS422.

          *Easy to operate.

          *Calibration factors for all gases.

          *Non-volatile parameter memory.

          *Switching functions with relay output.

           

          Model Number

          Specifications

          Power/Output

          Features

          Single Gauge

          TPG 261

          tpg261.jpg

          Display and Control units for compact gauges.

          * connection for 1 compact gauge.

          *Range: 5x10-11~55000 mbar.

          *Temp.:

          5~50(Operating)

          -20~60(Storage)

          *Protection: IP30.

           

          *Supply: 50/60 Hz, 90~250 VAC.

          *Output: 0~10 VDC.

          *Setpoint: 60 VAC, 1A, 2 pieces.

          *Error signal: 60 V, 1 piece.

          *Interface: RS232C

          *Easy to operate.

          *Calibration factors for all gases.

          *Non-volatile parameter memory.

          *Auto diagnostics.

           

          Model Number

          Specifications

          Power/Output

          Features

          Single Gauge

          TPG 262

          tpg262.jpg

          Display and Control units for compact gauges.

          * connection for 2 compact gauges.

          *Range: 5x10-11~55000 mbar.

          *Temp.:

          5~50(Operating)

          -20~60(Storage)

          *Protection: IP30.

           

          *Supply: 50/60 Hz, 90~250 VAC.

          *Output: 0~10 VDC.

          *Setpoint: 60 VAC, 1A, 4 pieces.

          *Error signal: 1 piece.

          *Interface: RS232C

          *Easy to operate.

          *Calibration factors for all gases.

          *Non-volatile parameter memory.

          *Auto diagnostics.

           

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